This etching machine can process materials finely with ion beam, which have applied for manufacturing MEMS device, sensors etc. We introduce the various equipment from small size to large.
Batch type ion beam etching machine : Hitachi High-Tech Corporation
Advanced CD Measurement SEM CG7300 : Hitachi High-Tech Corporation
Ion beam etching machine : Hitachi High-Tech Corporation
Conductor Etch System M-600/6000 Series : Hitachi High-Tech Corporation
Ion beam etching machine : Hitachi High-Tech Corporation
Hitachi's State-of-the-Art Ion Milling Systems : SI NEWS : Hitachi High-Tech Corporation
Single wafer type ion beam etching machine : Hitachi High-Tech Corporation
Plasma Etch Equipment
Ion beam etching machine : Hitachi High-Tech in Thailand